Prisma E SEM

ESEM for Materials Study

PT Wadya Prima Mulia as the Authorized Distributor for ThermoFisher Scientific in Indonesia, provides Prisma E Scanning Electron Microscope

Scanning electron microscope for industrial research and development with environmental scanning electron microscope capability.

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Environmental scanning electron microscope

The Thermo Scientific Prisma E Scanning Electron Microscope (SEM) combines a wide array of imaging and analytical modalities with advanced automation to offer the most complete solution of any instrument in its class. It is ideal for industrial research and development, quality control, and failure analysis applications that require high resolution, sample flexibility and an easy-to-use operator interface. The Prisma E SEM succeeds the highly successful Thermo Scientific Quanta SEM.


The unique combination of accessible all-round performance, a large set of accessories, and the most intuitive elemental analysis with Thermo Scientific ColorSEM make the Prisma E SEM the go-to SEM for micro-scale imaging and analysis in any industry or field.

Elemental information at your fingertips

Live composition-based image coloring for intuitive elemental analysis with optional ChemiSEM Technology and integrated energy-dispersive X-ray spectroscopy (EDS). Speed up your work and obtain the most complete sample information with always-on analysis.

Minimize sample preparation time

Low vacuum and ESEM capability enable charge-free imaging and analysis of nonconductive and/or hydrated specimens.

Excellent analytical capabilities

Excellent analytical capabilitieswith a chamber that allows 3 simultaneous EDS detectors, EDS ports that are 180° opposite, wavelength-dispersive spectroscopy (WDS), coplanar EDS/EBSD and high-quality charge-free EDS and EBSD in low vacuum.

Excellent image quality

Excellent image quality at low kV and low vacuum thanks to flexible vacuum modes, including through-the-lens differential pumping. Simultaneous secondary electron (SE) and backscattered electron (BSE) imaging in every mode of operation.

In-situ study of materials in their natural state

With the Prisma E SEM’s environmental SEM (ESEM) mode, samples can be imaged even if they are hot, dirty, outgassing or wet.

Easy to use

Easy to use, intuitive software with user guidance and undo functionality makes highly effective operation possible for novice users, while enabling experts to do their work faster and with fewer mouse clicks.

Resolution• 3.0 nm at 30 kV in high vacuum, low vacuum and ESEM
• 7.0 nm at 3 kV (BSED, beam decel.)
Standard detectorsETD, low-vacuum SED (LVD), gaseous SED for ESEM mode (GSED), IR camera
Optional detectorsThermo Scientific Nav-Cam+ Camera, DBS, DBS-GAD, ESEM-GAD, STEM 3+, WetSTEM, RGB-CLD, EDS, EBSD, WDS, Raman, EBIC, etc.
ChemiSEM Technology (optional)Live quantitative SEM image coloring is available based on energy-dispersive X-ray spectroscopy (EDS). Point & ID, linescan, region, element maps and accurate Noran quantification are included.
Stage bias (beam deceleration, optional)-4,000 V to +50 V
Low vacuum modeUp to 2,600 Pa (H2O) or 4,000 Pa (N2)
Stage5-axis motorized eucentric stage, 110 x 110 mm2 with a 105° tilt range. Maximum sample weight: 5 kg in un-tilted position.
Standard sample holderStandard multi-sample SEM holder uniquely mounts directly onto the stage, hosts up to 18 standard stubs (⌀ 12 mm), does not require tools to mount a sample
Standard sample holder• Standard multi-sample SEM holder uniquely mounts directly
• onto the stage, hosts up to 18 standard stubs (⌀ 12 mm), does
• not require tools to mount a sample
Chamber340 mm inside width, 12 ports, three simultaneous EDS detectors possible, two at 180°, coplanar EDS/EBSD orthogonal to the tilt axis of the stage
In situ accessories (optional)• Software controlled -20°C to +60°C Peltier cold stage
• Software controlled 1,000°C low vacuum/ESEM heating stage
• Software controlled 1,100°C high vacuum heating stage
• Software controlled 1,400°C low vacuum/ESEM heating stage
• IIntegrated gas injection: up to 2 units (other accessories may limit number of gas injection systems (GIS) available) for beam-induced deposition of the following materials:
→ Platinum
→ Tungsten
→ Carbon
• Manipulators
• Cryo-stage
• Electrical probing / multi-probing stations
Software optionsThermo Scientific Maps Software for automatic large area acquisition using tiling and stitching; correlative work
Thermo Scientific AutoScript 4 Software; a Python-based application programming interface
• Pattern generation software
• Thermo Scientific TopoMaps Software for image colorization, image analysis and 3D surface reconstruction

Process control using electron microscopy

Modern industry demands high throughput with superior quality, a balance that is maintained through robust process control. SEM and TEM tools with dedicated automation software provide rapid, multi-scale information for process monitoring and improvement.

Quality control and failure analysis

Quality control and assurance are essential in modern industry. We offer a range of EM and spectroscopy tools for multi-scale and multi-modal analysis of defects, allowing you to make reliable and informed decisions for process control and improvement.

Fundamental Materials Research

Novel materials are investigated at increasingly smaller scales for maximum control of their physical and chemical properties. Electron microscopy provides researchers with key insight into a wide variety of material characteristics at the micro- to nano-scale.

Semiconductor research and development

Innovation starts with research and development. Learn more about solutions to help you understand innovative structures and materials at the atomic level.

Semiconductor metrology

Manufacturing today’s complex semiconductors requires exact process controls. Learn more about advanced metrology and analysis solutions to accelerate yield learnings.

Semiconductor materials characterization

Many factors impact yield, performance, and reliability. Learn more about solutions to characterize physical, structural, and chemical properties.

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