SEM imaging and EDS elemental analysis
PT Wadya Prima Mulia as the Authorized Distributor for ThermoFisher Scientific in Indonesia, provides Verios 5 XHR Scanning Electron Microscope
Scanning electron microscopy characterization of nanomaterials with sub-nanometer resolution and high material contrast.
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Verios 5 XHR Scanning Electron Microscope
The Verios 5 XHR SEM offers subnanometer resolution over the full 1 keV to 30 keV energy range with excellent materials contrast. Unprecedented levels of automation and ease-of-use make this performance accessible to users of any experience level.
Scanning electron microscopy characterization
- High resolution nanomaterial imaging with the UC+ monochromated electron source for sub-nanometer performance from 1-30 kV.
- High contrast on sensitive materials with excellent performance down to 20 eV landing energy and high-sensitivity in-column and below-the-lens detectors and signal filtering for low-dose operation and optimal contrast selection.
- Greatly reduced time to nanoscale information for users with any experience level using the Elstar electron column featuring SmartAlign and FLASH technologies.
- Consistent measurement results with ConstantPower lenses, electrostatic scanning and a choice of two piezoelectric stages.
- Flexibility for accessories with a large chamber.
- Unattended SEM operation with Thermo Scientific AutoScript 4 Software, an optional Python-based application programming interface.
SmartAlign technology
SmartAlign technology eliminates the need for any user alignments of the electron column, which not only minimizes maintenance, but also increases your productivity.
Sub-nanometer resolution
Elstar Schottky monochromated (UC+) FESEM technology and performance with sub-nanometer resolution from 1 to 30 keV.
Low dose operation and optimal contrast selection
Advanced suite of high-sensitivity, in-column & below-the-lens detectors and signal filtering for low dose operation and optimal contrast selection.
Unattended SEM operation
Easily handle a wide range of applications, including insulating samples with Low Vac operation and advanced beam scanning to ensure high-fidelity imaging
Innovative electron optics
Including Thermo Scientific’s patented UC+ gun (monochromator), ConstantPower lenses and electrostatic scanning for accurate and stable imaging.
Consistent measurement results
The Verios is ideally suited to lab-based metrology applications, with the ability to calibrate to a NIST certified standard at high magnification.
Easy access to beam landing energies
As low as 20 eV with very high resolution for true surface characterization.
Large chamber
With a choice of two precise and stable piezo-driven stages.
| Electron beam resolution | • 0.6 nm at 30 kV STEM (optional) • 0.6 nm at 2-15 kV • 0.7 nm at 1 kV • 1.0 nm at 500 V |
| Standard detectors | ETD, TLD, MD, ICD, beam current measurement, Nav-Cam+, IR-camera |
| Optional detectors | Optional detectors | EDS, EBSD, RGB cathodoluminescence, Raman, WDS, and more |
| Stage bias (beam deceleration, optional) | Up to -4000 V, included as standard |
| Sample cleaning | Integrated plasma cleaner, included as standard |
| Sample manipulation | Verios 5 UC • 5-axis motorized eucentric stage, with XYR axes piezo driven. • XY range 150 x 150 mm2, 70° tilt range. • Loading through the door. Verios 5 HP • Chamber mounted, ultra-stable 5 axis all piezo motorized stage. • XY range 100 x 100 mm2, 70° tilt range. • Loading via automated load lock. |
| Chamber | 379 mm inside width, 21 ports |
| Software options | • Thermo Scientific Maps Software for automatic large area acquisition using tiling and stitching; correlative work • Thermo Scientific AutoScript 4 Software; a Python-based application programming interface • Pattern generation software • TopoMaps for image colorization, image analysis and 3D surface reconstruction |
Fundamental Materials Research
Novel materials are investigated at increasingly smaller scales for maximum control of their physical and chemical properties. Electron microscopy provides researchers with key insight into a wide variety of material characteristics at the micro- to nano-scale.
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